Evacuation of air or nitrogen Before filling with SF 6 gas the gas compartments must be evacuated in order to avoid mixing with air. Therefore it is evacuated to < 1 mbar with an integrated vacuum pump.
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Get PriceSulfur Hexafluoride. Sulfur Hexafluoride is a colorless, odorless liquified gas. SF6 is commonly used in plasma etching, but is widely used as an electrical insulator. Safety Data Sheets.
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